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iNano® Nano Indenter

Product Features

Key Features

  • High Accuracy InForce 50 Actuator
  • InQuest High Speed Controller
  • XY Motion System
  • NanoBlitz 3D & 4D Property Mapping
  • ISO 14577 & Standardised Tests
  • Sample Heating
The KLA iNano® nanoindenter system, with an example NanoBlitz 3D image

Make Nano Indentation Simple

KLA’s iNano® Nano Indenter is powered by the InView software package, which provides a modern and flexible interface to interact with nano indentation systems. In under a minute even inexperienced users can configure mechanical testing with InView’s guided setup. InView supports a wide selection of standard mechanical test procedures out of the box. Additional test methods for novel materials or new experiments can be programmed by users, and InView provides full control over all test parameters.

To ensure every user can maximise the potential of nano indentation, KLA provides access to a comprehensive learning portal with each instrument. A range of online webinars and documentation, covering both fundamental principles and advanced applications is available.

KLA iNano® nanoindenter hardware

Flexibility to Suit All Applications

The iNano has been design to be modular and customisable, with a range of options to adapt to almost any application. A sample heating chamber is available, which has a maximum heating temperature of 300°C. Samples are heated uniformly, with precision temperature control. Sample heating can be used together with many of the iNano’s mechanical testing modes.

To ensure maximum performance for high-sensitivity applications, an active vibration isolation system can be added. The isolation provides vibration reduction in six degrees of freedom, with no complicated setup or tuning required. A remote video option is also available, providing additional viewing angles inside the iNano’s chamber.

iNano® with vibration isolation platform and controller enclosure
A close up of the iNano® sample stage and indenter head

A Comprehensive Suite of Mechanical Tests

The iMicro supports a wide range of mechanical test types. Hardness and modulus tests (Oliver-Pharr) can be performed on a wide range of materials, including soft materials such as ultra-soft gels. Full support for ISO 14577 hardness testing is also included as standard. Scratch and wear tests can be performed on a broad set of materials, including thin films and polymers.

For more advanced testing, the iNano can be configured for Continuous Stiffness Measurement (CSM), substate-independent thin film measurement with AccuFilm™, and ProbeDMA™ for testing viscoelastic properties of polymers. A package is also available providing complex modulus measurement for biomaterials.

Example data produced by a KLA nanoindenter

Fast & Accurate Measurement

With the iNano, nanoscale mechanical testing is quick and reliable. The InForce actuator design used by KLA is based on electromagnetic force actuation and capacitance displacement technology. This design allows for the force actuation and displacement measurement to be decoupled, making it possible to independently optimise them to maximise performance. InForce actuators have a high stiffness and maximised vertical stability, and feature the highest calibration stability on the market.

To further ensure accuracy, regardless of material or load, the iNano uses a high-stiffness carbon fibre gantry. Passive vibration isolation is integrated into the iNano enclosure, providing a low noise floor during measurement.

A close up of the iNano® system’s gantry, with the sample stage and indenter actuator head

Visualise Mechanical Properties with NanoBlitz 3D & NanoBlitz 4D

3D nanomechanical property maps can be generated with NanoBlitz 3D. Using the iNano’s motorised XY stage, NanoBlitz 3D uses an array of up to 100,000 indents to produce a property map of a sample region. Young’s modulus, hardness, and stiffness values are recorded for each indent. NanoBlitz 3D is fast, with each indent taking less than 1 second to perform, including stage movement.

By expanding the iNano’s Continuous Stiffness Measurement (CSM) capability, NanoBlitz 4D is able to generate mechanical property tomography. By performing up to 10,000 indents at 5 to 10 seconds per indent, mechanical properties can be visually mapped at multiple depths. Young’s modulus, hardness, and stiffness values are recorded as a function of depth for each indent.

An example NanoBlitz 3D property map of a sample
NanoBlitz 3D image showing hardness mapping
An example NanoBlitz 4D property plot at a specific depth of a sample
NanoBlitz 4D mapping at two different depths

Technical Specifications

Actuator Specifications
Displacement measurement Capacitive Gauge
Displacement range 50 microns
Displacement resolution (electronic) 0.001 nm
Typical noise < 0.1 nm
Load Application Electromagnetic
Maximum Load 50 mN
Load Resolution 3 nN
Controller Specifications
Data Acquisition Rate 100 khz
Closed Loop CPU Control Rate 1 kHz
Time Constants 20 μs and higher
Dynamic Excitation Frequencies 0.1 Hz - 1 kHz
Load Frame Stiffness >1e6 N/m
Dynamic Excitation Frequencies ≥200mm diameter
Thermal Drift Rate ≤0.05 nm/s

Product Downloads


Product Brochure

Application Notes

Critical Assessment of High Speed Nanoindentation Mapping Technique and Data Deconvolution on Thermal Barrier Coatings

Author: B.Vignesh, W.C.Oliver,
Publication: Materials and Design 181 (2019) 108084

A Critical Assessment of the Effect of Indentation Spacing on the Measurement of Hardness and Modulus Using Instrumented Indentation Testing

Author: P.Sudharshan Phani, W.C.Oliver
Publication: Materials and Design 164 (2019) 107563

Effect of Annealing on 50nm Gold Films

KLA Application Note

Cross-Sectional DMA Testing on Automotive Tires Using Continuous Stiff ness Measurement on Nanoindentation

KLA Application Note

Mechanical Characterization of Sol-Gel Coatings Using KLA Nano Indenter systems

KLA Application Note

Instrumented Indentation Testing with the KLA Nano Indenter® systems

KLA Application Note

In Vitro Complex Shear Modulus of Bovine Muscle Tissue (Steak)

KLA Application Note

Strain Rate Sensitivity of Thin Metal Films by Instrumented Indentation

KLA Application Note