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iMicro Nano Indenter

Product Features

Key Features

  • Interchangeable InForce Actuators
  • InQuest High Speed Controller
  • XY Motion System
  • NanoBlitz 3D & 4D Property Mapping
  • ISO 14577 & Standardised Tests
  • Sample Heating
The KLA iMicro nanoindenter system, with an example NanoBlitz 3D image

Nano Indentation Made Easy

To make nano indentation as easy as possible, KLA have developed the InView software, a flexible and modern software package. Mechanical testing can be set up in under a minute with InView’s guided setup. A large range of standard test methods are pre-programmed into the system. New test protocols can also be configured for novel experiments or materials, with full control over all testing parameters.

With each nano indentation system, KLA also provides access to a comprehensive online nano indentation learning portal. This includes webinars and documentation on both the basic principles and advanced applications of nano indentation and the iMicro’s features.

The KLA iMicro nanoindenter hardware, with InView operating software running

Flexible & Extensible Design

The iMicro’s design features interchangeable actuators, which allows the iMicro to support a wide range of materials, both hard and soft. The InForce 1000 actuator is supplied as standard, with a max force of 1N. For soft materials, the InForce 50 actuator is available, with a maximum force of 50mN. The optional Gemini 2D transducer provides two-axis dynamic measurement.

A wide range of options are also available to enhance the iMicro’s capabilities. This includes integrated sample heating, with a maximum temperature of 300°C. The heating chamber provides uniform sample heating with precision temperature control, and is compatible with many of the iMicro’s advanced testing methods.

The gantry of an iMicro system
KLA InForce 1000 and InForce 50 interchangeable actuators

Comprehensive Mechanical Testing Capabilities

A comprehensive range of mechanical tests are supported by the iMicro. The iMicro can perform hardness and modulus measurements (Oliver-Pharr) for a variety of materials, from ultra-soft gels to hard coatings. ISO 14577 hardness testing is full supported. Scratch and wear testing is also supported on a wide selection of materials.

Options are also available for Continuous Stiffness Measurement (CSM), AccuFilm™ for substrate independent thin film measurement, and ProbeDMA™ for testing viscoelastic properties of polymers. An option is also available for measuring the complex modulus of biomaterials.

Example data produced by a KLA nanoindenter

Fast & Accurate Measurement

The iMicro has been designed to make nanomechanical testing both fast and accurate. KLA’s actuator design utilises electromagnetic force actuation and capacitance displacement technology. The force actuation and displacement measurement are decoupled, allowing them to be independently optimised to maximise performance. This design provides a high stiffness while maximising vertical stability, and provides the highest calibration stability on the market.

The iMicro also features a high stiffness gantry to ensure measurement is accurate across a wide range of materials, even at high loads. Integrated vibration isolation is also provided to ensure a low noise floor during operation.

A close up of the iMicro system’s gantry, with the sample stage and indenter actuator head

NanoBlitz 3D & NanoBlitz 4D Mechanical Property Mapping

NanoBlitz 3D generates 3D maps of nanomechanical properties. Using the iMicro’s automatic XY stage, NanoBlitz 3D performs up to 100,000 indents across a sample. Young’s modulus, hardness, and stiffness values are recorded for each indent, and can be visualised as property maps. Mapping with NanoBlitz 3D is fast, taking less than 1 second per indent, including stage movement time.

NanoBlitz 4D extends iMicro’s Continuous Stiffness Measurement (CSM) capability to provide mechanical property tomography. Up to 10,000 indents are performed at 5 to 10 seconds per indent. Young’s modulus, hardness, and stiffness values are recorded as a function of depth for each indent, which can be visualised as a set of property maps.

An example NanoBlitz 3D property map of a sample
NanoBlitz 3D image showing hardness mapping
An example NanoBlitz 4D property plot displaying data at 2 different depths of a sample
NanoBlitz 4D mapping at two different depths

Technical Specifications

Actuator Specifications
Displacement measurement Capacitive Gauge
Displacement range 80 microns
Displacement resolution (electronic) 0.04 nm
Typical noise < 0.25 nm
Load Application Electromagnetic
Maximum Load 1000 mN
Load Resolution 6 nN
Controller Specifications
Data Acquisition Rate 100 khz
Closed Loop CPU Control Rate 500 Hz
Dynamic Excitation Frequencies 0.1 Hz - 1 kHz

Product Downloads


Product Brochure

Application Notes

Effect of Annealing on 50nm Gold Films

KLA Application Note

Cross-Sectional DMA Testing on Automotive Tires Using Continuous Stiff ness Measurement on Nanoindentation

KLA Application Note

Mechanical Characterization of Sol-Gel Coatings Using KLA Nano Indenter systems

KLA Application Note

Instrumented Indentation Testing with the KLA Nano Indenter® systems

KLA Application Note

In Vitro Complex Shear Modulus of Bovine Muscle Tissue (Steak)

KLA Application Note

Strain Rate Sensitivity of Thin Metal Films by Instrumented Indentation

KLA Application Note