F60-t Series Automatic Thin Film Mapping Analysers
- Intuitive Analysis Software
- 1.5mm to 150μm Spot Size
- Large Material Reference Library
- Wide Spectrometer Wavelength Range
- Fast & Efficient Thickness Mapping
- 2” to 300mm Wafer Diameters
Automatic Thickness Mapping for Production Environments
The Filmetrics F60-t series brings the power of Filmetrics’ F50 automatic thickness mapping platform to the production environment. The F60-t features the same accurate and high-speed measurement technology, able to complete a typical 49-pint thickness map in around 45 seconds. A motorised R-Theta stage automatically moves to each measurement point, and is able to accept wafers from 2” to 300mm in diameter.
The F60-t series features a number of features specifically for production environments. This includes automatic notch finding, automatic on-board baselining, and enclosed measurement stage with motion interlock, and an integrated industrial computer.
Efficient & Intuitive Analysis Software
To make film measurement workflows as simple as possible, Filmetrics have developed the FILMapper film thickness mapping and analysis software package. It includes a library of over 130 preconfigured materials, with access to thousands more available. A series of thickness map templates are included, with custom maps also able to be configured. Customisable mapping parameters include map shape and pattern, centre or edge exclusion, and spot density.
Filmetrics technology is robust and reliable. To ensure minimum downtime, Filmetrics also provides a comprehensive package of technical assistance. This includes online diagnostics and application support, available 24 hours a day.
Thickness Range Model Specifications
|Model||Thickness Range*||Wavelength Range|
|F60||20nm - 70µm||380-1050nm|
|F60-UV||5nm - 40µm||190-1100nm|
|F60-NIR||100nm - 250µm||950-1700nm|
|F60-EXR||20nm - 250µm||380-1700nm|
|F60-UVX||5nm - 250µm||190-1700nm|
|F60-XT||0.2µm - 450µm||1440-1690nm|
|F60-s980||4µm - 1mm||960-1000nm|
|F60-t-s1310||7µm - 2mm||1280-1340nm|
|F60-t-s1550||10µm - 3mm||1520-1580nm|
* Film Stack Dependant
Filmetrics F60-t Series Thin Film Analyser Data Sheet