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F60-t Series Automatic Thin Film Mapping Analysers

Product Features

Key Features

  • Intuitive Analysis Software
  • 1.5mm to 150μm Spot Size
  • Large Material Reference Library
  • Wide Spectrometer Wavelength Range
  • Fast & Efficient Thickness Mapping
  • 2” to 300mm Wafer Diameters
Filmetrics F60-t Series system

Automatic Thickness Mapping for Production Environments

The Filmetrics F60-t series brings the power of Filmetrics’ F50 automatic thickness mapping platform to the production environment. The F60-t features the same accurate and high-speed measurement technology, able to complete a typical 49-pint thickness map in around 45 seconds. A motorised R-Theta stage automatically moves to each measurement point, and is able to accept wafers from 2” to 300mm in diameter.

The F60-t series features a number of features specifically for production environments. This includes automatic notch finding, automatic on-board baselining, and enclosed measurement stage with motion interlock, and an integrated industrial computer.

Filmetrics F60-t Series system

Efficient & Intuitive Analysis Software

To make film measurement workflows as simple as possible, Filmetrics have developed the FILMapper film thickness mapping and analysis software package. It includes a library of over 130 preconfigured materials, with access to thousands more available. A series of thickness map templates are included, with custom maps also able to be configured. Customisable mapping parameters include map shape and pattern, centre or edge exclusion, and spot density.

Filmetrics technology is robust and reliable. To ensure minimum downtime, Filmetrics also provides a comprehensive package of technical assistance. This includes online diagnostics and application support, available 24 hours a day.

An example screenshot of Filmetrics’ FILMapper software

Thickness Range Model Specifications

Model Thickness Range* Wavelength Range
F60 20nm - 70µm 380-1050nm
F60-UV 5nm - 40µm 190-1100nm
F60-NIR 100nm - 250µm 950-1700nm
F60-EXR 20nm - 250µm 380-1700nm
F60-UVX 5nm - 250µm 190-1700nm
F60-XT 0.2µm - 450µm 1440-1690nm
F60-s980 4µm - 1mm 960-1000nm
F60-t-s1310 7µm - 2mm 1280-1340nm
F60-t-s1550 10µm - 3mm 1520-1580nm

* Film Stack Dependant

A graph of the thickness ranges supported by different models of the Filmetrics F60-t series

Product Downloads

Literature

Data Sheet

Filmetrics F60-t Series Thin Film Analyser Data Sheet