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F54 Series Automatic Thin Film Mapping Analysers

Product Features

Key Features

  • Intuitive Analysis Software
  • 1.5mm to 150μm Spot Size
  • Large Material Reference Library
  • Wide Spectrometer Wavelength Range
  • Measures up to 2 Points per Second
  • Maximum 450mm Sample Diameter
A Filmetrics F54 series system, with an example FILMapper 3D film thickness map

Automatic Film Thickness Mapping

Filmetrics’ F54 series of automatic film thickness mappers are simple to use, and provide fast, accurate results. Able to measure up to 2 points a second, the F54 series are highly efficient, able to produce even large maps in a short time period. Automatic mapping produced with a motorised R-Theta stage, supporting samples up to 450mm in diameter, and designed to be reliable and robust.

Numerous thickness maps a predefined, including polar, rectangular, and linear map patterns. Users can also configure custom maps, with no limit on the number of measurement points. The F54 platform is simple to set up and intuitive to use, requiring little user training.

Front view of a Filmetrics F54 Series system

Visualise Thickness in 2D & 3D with FILMapper

To make film thickness mapping fast and easy, Filmetrics have developed the FILMapper software package. The built-in material reference library includes over 130 materials, with thousands of additional materials available. FILMapper has a selection of film thickness map types preconfigured, and operators can also set up custom maps. Map shape and pattern, centre or edge exclusion, and spot density can all be customised. Thickness amps can be viewed in fully-rotatable 3D, providing the best possible visualisation of samples.

For each film thickness analysis tool, Filmetrics provides a comprehensive support package. This includes 24-hour online assistance, diagnostics and applications support.

An example screenshot of Filmetrics’ FILMeasure software

Thickness Range Model Specifications

Model Thickness Range* Wavelength Range
F54 20nm - 45µm 380-1050nm
F54-UV 4nm - 35µm 190-1100nm
F54-NIR 100nm - 115µm 950-1700nm
F54-EXR 20nm - 115µm 380-1700nm
F54-UVX 4nm - 115µm 190-1700nm

* Material and Objective Dependent

A graph of the thickness ranges supported by different models of the Filmetrics F54 series

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Literature

Data Sheet

Filmetrics F54 Series Thin Film Analyser Data Sheet