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F30 Series In-Line Thin Film Analysers

Product Features

Key Features

  • Improves Productivity
  • Accurate Greater Than ±1%
  • Fast Measurement in Seconds
  • Non-Invasive Measurement
  • Easy to Operate
  • Turn-Key Setup
Filmetrics F30 Series system

A Powerful Solution for Monitoring Thin Film Deposition

With the Filmetrics F30 series of in-line thin film analysers, deposition rates, film thickness, optical constants, and uniformity of semiconductors and dielectric layers can be measured in real time. Filmetrics’ advanced film measurement technology provides fast and accurate measurements in a simple to install turn-key package.

The F30 series provides several measurement tools in one. It provides a predisposition calibration tool to make adjustments to a process recipe before deposition, a real-time monitor of the deposition process, a fault sensor, and post-deposition evaluation. A variety of layer types are supported, both smooth and translucent, or lightly absorbing. This includes almost all semiconducting materials, from AIGaN to GaInAsP.

Filmetrics F30 Series system controller with integrated light source

Thickness Range Model Specifications

Model Thickness Range* Wavelength Range
F30 15nm - 70µm 380-1050nm
F30-UV 3nm - 40µm 190-1100nm
F30-NIR 100nm - 250µm 950-1700nm
F30-EXR 15nm - 250µm 380-1700nm
F30-UVX 3nm - 250µm 190-1700nm
F30-XT .2µm - 450µm 1440-1690nm

* Film Stack Dependant

A graph of the thickness ranges supported by different models of the Filmetrics F20 series

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Literature

Data Sheet

Filmetrics F30 Series Thin Film Analyser Data Sheet