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F3-sX Series Single Spot Thin Film Analysers

Product Features

Key Features

  • Easy to Use Analysis Software
  • 10µm spot size
  • Large Material Reference Library
  • Wide Spectrometer Wavelength Range
  • Measures in Under a Second
  • Modular & Expandable
Filmetrics F3-sX Series system with light source controller and stage

Fast & Accurate Film Measurement for Thick Layers

Filmetric’s F3-sX Series of film measurement systems have been designed to measure challenging semiconductor and dielectric layers up to 3mm thick. The F3-sX system is able to measure such thick layers quickly and accurately by using a 10µm spot size. With Filmetrics’ advanced measurement technology, accurate measurements can be made in under a second. A variety of models are available, covering different thickness ranges.

The F3-sX Series users near infrared (NIR) light to perform thickness measurements, which allows measurements of materials opaque to the naked eye. A wide selection of accessories are available to enhance the systems’ capabilities. Each Filmetrics system also come with a comprehensive support package, including online technical and applications assistance.

Filmetrics F3-sX Series system with light source controller and stage

Software Designed with Ease of Use in Mind

With Filmetrics’ FILMeasure software package, film measurement is easer than ever before. Simple and easy to use, FILMeasure is quick to learn, even for inexperienced users. A reference library of over 130 materials is included as standard, with thousands more also available. New materials can be added to the library by measuring their refractive index values.

Measurement recipes can be programmed and secured, to make repeated measurement processes easy. This helps ensure reliability of repeated measurement, such as in quality control applications.

An example screenshot of Filmetrics’ FILMeasure software

Thickness Range Model Specifications

Model Thickness Range* Wavelength Range
F3-s980 10µm - 1mm 960-1000nm
F3-s1310 15µm - 2mm 1280-1340nm
F3-s1550 25µm - 3mm 1520-1580nm

* Film Stack Dependant

The F3-s980 has been designed as a low-cost system. The Fs1310 has been optimised for heavy-doped-silicon. The Fs1550 is suitable for measuring the thickest possible layers.

A graph of the thickness ranges supported by different models of the Filmetrics F20 series

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Literature

Data Sheet

Filmetrics F3-sX Series Thin Film Analyser Data Sheet