F3-sX Series Single Spot Thin Film Analysers
- Easy to Use Analysis Software
- 10µm spot size
- Large Material Reference Library
- Wide Spectrometer Wavelength Range
- Measures in Under a Second
- Modular & Expandable
Fast & Accurate Film Measurement for Thick Layers
Filmetric’s F3-sX Series of film measurement systems have been designed to measure challenging semiconductor and dielectric layers up to 3mm thick. The F3-sX system is able to measure such thick layers quickly and accurately by using a 10µm spot size. With Filmetrics’ advanced measurement technology, accurate measurements can be made in under a second. A variety of models are available, covering different thickness ranges.
The F3-sX Series users near infrared (NIR) light to perform thickness measurements, which allows measurements of materials opaque to the naked eye. A wide selection of accessories are available to enhance the systems’ capabilities. Each Filmetrics system also come with a comprehensive support package, including online technical and applications assistance.
Software Designed with Ease of Use in Mind
With Filmetrics’ FILMeasure software package, film measurement is easer than ever before. Simple and easy to use, FILMeasure is quick to learn, even for inexperienced users. A reference library of over 130 materials is included as standard, with thousands more also available. New materials can be added to the library by measuring their refractive index values.
Measurement recipes can be programmed and secured, to make repeated measurement processes easy. This helps ensure reliability of repeated measurement, such as in quality control applications.
Thickness Range Model Specifications
|Model||Thickness Range*||Wavelength Range|
|F3-s980||10µm - 1mm||960-1000nm|
|F3-s1310||15µm - 2mm||1280-1340nm|
|F3-s1550||25µm - 3mm||1520-1580nm|
* Film Stack Dependant
The F3-s980 has been designed as a low-cost system. The Fs1310 has been optimised for heavy-doped-silicon. The Fs1550 is suitable for measuring the thickest possible layers.
Filmetrics F3-sX Series Thin Film Analyser Data Sheet