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EM-30AX Plus & LE Desktop Scanning Electron Microscope with EDS

Product Features

Key Features

  • Tungsten or CeB6 Filaments
  • High Resolution Imaging
  • SE & BSE Imaging
  • 3 Axis Motorised Stage XYT
  • Powerful Integrated EDS
  • Intuitive NanoStation Software
The COXEM EM-30AX desktop SEM system, with an example SEM image

Ease of Use

The integrated features of the EM-30AX and COXEM's simple NanoStation operating software make ease of use guaranteed. Ideal for novice SEM users, NanoStation provides a simple and clean graphical interface, with quick access to common imaging settings. Users can click to move around the sample via a mini-map, which provides an overall view of the sample. NanoStation's Expert mode will satisfy the most demanding advanced users with access to a full range of settings and advanced features.

The EM30AX includes a motorised 3-axis XYT sample stage as standard, making it efficient and easy to control the position of the sample while in the chamber. An optional "NavCam" can capture an image of the sample holder when loaded, allowing users to navigate the samples visually.

A screenshot of the COXEM NanoStation SEM operating software

Imaging Capabilities

  • 5 nm resolution
  • 150,000X magnification
  • 1 - 30 kV beam energy
  • Dual SE & BSE detectors
  • Integrated EDS
An example SEM image produced with a COXEM SEM of a microneedle patch at 500x magnification

Tungsten and CeB6 Electron Sources

COXEM's EM-30AX is the only desktop SEM platform available which can be configured with either a Tungsten (EM-30AX Plus) or CeB6 (EM-30AX LE) electron source. With a choice of electron source, a COXEM SEM has the flexibility to suit any application.

A tungsten filament electron source has a typical operating life of around 100 "beam on" hours, is low cost to replace, and be easily exchanged in less than 10 minutes. Tungsten filaments provide good imaging performance while remaining cost-effective.

CeB6, or Cerium hexaboride, filaments can produce a brighter image, which reduces noise and improves high resolution performance. The operating lifetime of a CeB6 filament is higher than a Tungsten, but has a much greater cost to replace. Replacing a CeB6 filament can require specialist maintenance, creating inconvenience and increasing downtime.When finding the right SEM, deciding on the best electron beam source can be difficult. To help with this, the team at CN Tech are happy to provide guidance on finding the right SEM for any application.

Backscatter Electron Detector

COXEM's EM30AX desktop SEM features dual secondary electron (SE) and backscatter electron (BSE) detectors. The 4 quadrant BSE detector can be operated in Composition mode for atomic weight contrasted images, or Topo mode for producing topographic images of flat samples.

The BSE detector integrated into the EM-40AX is retractable without disconnection, being able to pivot away to a parking position. This unique feature can only be found in COXEM desktop SEMs. Retracting the BSE detector allows for a shorter working distance when using the SE detector.

Secondary Electron (SE) image
Imaging with the Secondary Electron (SE) Detector
Backscatter Electron (BSE) image
Imaging with the Backscatter Electron (BSE) Detector

3-Axis Sample Positioning Stage

A motorised 3-axis XYT sample position stage ins included as standard with COXEM's EM-30AX. Navigating a sample is easy with the NanoStation operating software, which features a "click to move" interface. To provide easier examination of a flat sample's topography, the stage can be tilted. Stage tilting is compucentric, adjusting the X axis to ensure the desired region of interest always remains the field of view while tilting.

The chamber door opened on the EM-30AX SEM to reveal the 3-axis sample positioning stage and sample holder


Energy Dispersive Spectroscopy (EDS) capability is fully integrated into COXEM's EM-30AX Desktop SEM. With integrated EDS Analysis, elemental and chemical analysis of samples can be performed on materials at high magnifications.

COXEM have partnered with Oxford Instruments, a leading developer of materials characterisation tools for in-situ use in electron microscopes. Oxford Instruments have produced a miniaturised form of their AZtecOne EDS technology for a desktop electron microscope, called the AZtecOneGO.

The Oxford Instruments AZtecOneGO EDS system included in the EM-30 AX consists of the intuitive AZtecOneGO software, and Oxford Instrument's reliable and accurate compact x-act Silicon Drift Detector (SDD). AZtecOneGO is the ideal solution for conducting EDS analysis as quickly and easily as possible.

With a simple, streamlined interface, AZtecOneGO is quick and easy to use, even by novice users with no advanced knowledge of the EDS technique. Features include X-ray mapping and linescanning, spectrum acquisition, and fast report generation.

Example EDS image generated by an Oxford Instruments EDS system

Technical Specifications

Electron Beam System
Electron Source Tungsten (EM-30 Plus) or CeB6 (EM-30 LE)
Resolution 5nm
Accelerating Voltage 1kV to 30kV
Detector SE Detector, BSE Detector
Imaging Capabilities
Magnification x20 ~ x150,000
Image Sizes RDE: 320x240
TV: 640x480
Slow: 800x600
Photo: 1280x960, 2560x1920, 5120x3840
Frame Rates RDE: Max 30 frames/sec
TV: Max 10 frames/sec
Slow: Max 2 frames/sec
Image Formats BMP, JPEG, PNG, TIFF
Auto Functions Auto Focus
Auto Contrast
Auto Brightness
Auto Filament
Auto Start
Sample Positioning Stage
Stage Type Motorised 3 Axis XYT
X 35mm
Y 35mm
T 0 to 45°
R 360°
Z 5 to 50mm
Maxium Sample Size 60mm in diameter
45mm in height
Main Unit Width 400mm
Main Unit Length 600mm
Main Unit Height 550mm

Options & Accessories

Low Vacuum System

COXEM offer a Low Vacuum System for imaging non-conductive samples without coating during sample preparation. Low vacuum operation can be used to image biological samples or insulating materials in electronics.

Low vacuum operation is used with the BSE detector for imaging, and is effective at low magnifications. The possible vacuum range is 100pa to 1pa.

High Vacuum Mode SEM Image
Imaging in High Vacuum Mode
Imaging in Low Vacuum Mode
Imaging in Low Vacuum Mode

Cool Stage

The COXEM Cool Stage is a temperature-controlled sample stage for COXEM Scanning Electron Microscopes systems. A cool stage is used in electron microscopy to chill biological or other wet specimens, preserving surface features and improving imaging ability. Samples can be cooled to -25°C, and also heated up to 50°C. Temperature is controlled digitally.

COXEM Cool Stage and Cool Stage controller
A SEM image of plant cells, imaged without a Cool Stage and displaying distorted features
Plant cells imaged without Cool Stage
A SEM image of plant cells, imaged with a Cool Stage and showing well preserved surface integrity
Plant cells imaged with Cool Stage

STEM Detector

Both full size and benchtop Scanning Electron Microscope (SEM) systems from COXEM can be expanded to support Scanning Transmission Electron Microscopy (STEM) capabilities with the COXEM STEM Detector. This allows a COXEM SEM to handle multiple imaging applications outside of standard SEM imaging tasks.

COXEM's STEM Detector is mounted inside the SEM chamber, and can be retracted and tilted 90° out of the field of view to allow regular SEM functions. Support for the STEM Detector is fully integrated into the NanoStation operating software for COXEM SEMs, with the same simple and easy operation.

True TEM Detector

Most STEM modules differ from the true TEM principle, and use a platinum mirror and the SEM's SE detector to collect an image. The COXEM STEM Detector uses a true TEM detector beneath the TEM sample.

The STEM Detector supports both Bright Field (BF) and Dark Field (DF) imaging.

TEM Grid Holder

A specially designed TEM grid holder is included with the STEM detector, which mounts onto the SEM stage. Up to 4 standard TEM grids can be accommodated in the holder. The holder has been designed to allow EDS analysis without the need for separate adjustment.

COXEM STEM Detector and TEM sample holder

Product Downloads


COXEM Brochure

COXEM Scanning Electron Microscope range brochure.

Application Notes

COXEM Application Notes 1

A selection of applications documented by COXEM from the life sciences and materials sciences.

COXEM Application Notes 2

A selection of applications documented by COXEM discussing electron microscopy techiques.