EM-30AX Plus & LE Desktop Scanning Electron Microscope with EDS

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Short Description
  • The COXEM EM-30AX Desktop Scanning Electron Microscope offers advanced, high-end features in a compact form factor. This desktop SEM features high resolution imaging and dual SE and BSE detectors. A 3-axis motorised stage is included as standard for efficient and simple operation. The EM-30AX has integrated EDS for elemental microanalysis.

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Product Overview
  • The EM-30AX is one of the most advanced desktop SEM systems on the market today, offering high-end capabilities in a compact form factor. COXEM have developed the only desktop SEM configurable with either a Tungsten (EM-30AX Plus) or CeB6 (EM-30AX LE) electron source. Featuring high resolution imaging, with integrated dual SE and BSE detectors, the EM-30AX has powerful imaging capabilities. With the simple NanoStation operating software, and a 3-axis motorised stage as standard, ease of used is assured. The EM-30AX includes integrated AZtecOneGO EDS (Energy Dispersive Spectroscopy) from Oxford Instruments for elemental microanalysis. With the inclusion of EDS, COXEM's EM-30AX is a perfect platform for both electron microscopy and materials characterisation applications.

    Key Features

    • Tungsten or CeB6 Filaments
    • High Resolution Imaging
    • SE & BSE Imaging Detectors
    • 3 Axis Motorised Stage XYT
    • Powerful Integrated EDS
    • Intuitive NanoStation software

    Ease of Use

    The integrated features of the EM-30AX and COXEM's simple NanoStation operating software make ease of use guaranteed. Ideal for novice SEM users, NanoStation provides a simple and clean graphical interface, with quick access to common imaging settings. Users can click to move around the sample via a mini-map, which provides an overall view of the sample. NanoStation's Expert mode will satisfy the most demanding advanced users with access to a full range of settings and advanced features.

    The EM30AX includes a motorised 3-axis XYT sample stage as standard, making it efficient and easy to control the position of the sample while in the chamber. An optional "NavCam" can capture an image of the sample holder when loaded, allowing users to navigate the samples visually.

    Imaging Capabilities

    • 5 nm resolution
    • 150,000X magnification
    • 1 - 30 kV beam energy
    • Dual SE & BSE detectors
    • Integrated EDS

    Tungsten and CeB6 Electron Sources

    COXEM's EM-30AX is the only desktop SEM platform available which can be configured with either a Tungsten (EM-30AX Plus) or CeB6 (EM-30AX LE) electron source. With a choice of electron source, a COXEM SEM has the flexibility to suit any application.

    A tungsten filament electron source has a typical operating life of around 100 "beam on" hours, is low cost to replace, and be easily exchanged in less than 10 minutes. Tungsten filaments provide good imaging performance while remaining cost-effective.

    CeB6, or Cerium hexaboride, filaments can produce a brighter image, which reduces noise and improves high resolution performance. The operating lifetime of a CeB6 filament is higher than a Tungsten, but has a much greater cost to replace. Replacing a CeB6 filament can require specialist maintenance, creating inconvenience and increasing downtime.

    When finding the right SEM, deciding on the best electron beam source can be difficult. To help with this, the team at CN Tech are happy to provide guidance on finding the right SEM for any application.

    Backscatter Electron Detector

    Secondary Electron (SE) Image
    Imaging with the Secondary Electron (SE) Detector
    Backscatter Electron (SE) Image
    Imaging with the Backscatter Electron (BSE) Detector

    COXEM's EM30AX desktop SEM features dual secondary electron (SE) and backscatter electron (BSE) detectors. The 4 quadrant BSE detector can be operated in Composition mode for atomic weight contrasted images, or Topo mode for producing topographic images of flat samples.

    The BSE detector integrated into the EM-40AX is retractable without disconnection, being able to pivot away to a parking position. This unique feature can only be found in COXEM desktop SEMs. Retracting the BSE detector allows for a shorter working distance when using the SE detector.

    3-Axis Sample Positioning Stage

    A motorised 3-axis XYT sample position stage ins included as standard with COXEM's EM-30AX. Navigating a sample is easy with the NanoStation operating software, which features a "click to move" interface. To provide easier examination of a flat sample's topography, the stage can be tilted. Stage tilting is compucentric, adjusting the X axis to ensure the desired region of interest always remains the field of view while tilting.

    Panorama Mode

    Using the 3-axis motorised stage and NanoStation operating software together provides a Panorama mode, for capturing high resolution images of large samples. Hundreds of thousands of images can be collected across a large sample, through automatic control of the motorised stage. COXEM's NanoStation software can then automatically stitch the images together, creating a single high magnification image of a large sample.


    Energy Dispersive Spectroscopy (EDS) capability is fully integrated into COXEM's EM-30AX Desktop SEM. With integrated EDS Analysis, elemental and chemical analysis of samples can be performed on materials at high magnifications.

    COXEM have partnered with Oxford Instruments, a leading developer of materials characterisation tools for in-situ use in electron microscopes. Oxford Instruments have produced a miniaturised form of their AZtecOne EDS technology for a desktop electron microscope, called the AZtecOneGO.

    The Oxford Instruments AZtecOneGO EDS system included in the EM-30 AX consists of the intuitive AZtecOneGO software, and Oxford Instrument's reliable and accurate compact x-act Silicon Drift Detector (SDD). AZtecOneGO is the ideal solution for conducting EDS analysis as quickly and easily as possible.

    With a simple, streamlined interface, AZtecOneGO is quick and easy to use, even by novice users with no advanced knowledge of the EDS technique. Features include X-ray mapping and linescanning, spectrum acquisition, and fast report generation.

  • Electron Beam System
    Electron Source Tungsten (EM-30 Plus) or CeB6 (EM-30 LE)
    Resolution 5nm
    Accelerating Voltage 1kV to 30kV
    Detector SE Detector, BSE Detector
    Imaging Capabilities
    Magnification x20 ~ x150,000
    Image Sizes RDE: 320x240
    TV: 640x480
    Slow: 800x600
    Photo: 1280x960, 2560x1920, 5120x3840
    Frame Rates RDE: Max 30 frames/sec
    TV: Max 10 frames/sec
    Slow: Max 2 frames/sec
    Image Formats BMP, JPEG, PNG, TIFF
    Auto Functions Auto Focus
    Auto Contrast
    Auto Brightness
    Auto Filament
    Auto Start
    Sample Positioning Stage
    Stage Type Motorised 3 Axis XYT
    X 35mm
    Y 35mm
    T 0 to 45°
    R 360°
    Z 5 to 50mm
    Maxium Sample Size 60mm in diameter
    45mm in height
    Main Unit Width 400mm
    Main Unit Length 600mm
    Main Unit Height 550mm
Product Options
  • Low Vacuum System

    Optional Low vacuum SEM imaging can be used with COXEM SEMs to image no-conductive samples without coating. Low vacuum operation is used with the BSE detector for imaging.

    Cool Stage

    The Cool Stage is a temperature-controlled sample stage for COXEM electron microscopes. A cool stage can be used to maintain surface features of biological or other wet specimens. Samples can be chilled to -25°C, and also heated up to 50°C.

    STEM Detector

    Full Size and Tabletop SEMs from COXEM can be expanded with Scanning Transmission Electron Microscopy (STEM) capabilities with COXEM's STEM Detector. The STEM Detector is retractable to allow standard SEM functions, and features a true TEM detector positioned beneath the TEM sample. Supports BF and DF imaging, and with a holder for 4 TEM grids.

    SPT-20 Ion Sputter Coater

    The SPT-20 Ion Sputter Coater is a simple to use, compact and cost-effective solution for sputter coating non-conductive specimens in SEM sample preparation. Features a user friendly touch screen interface, and supports multiple metal types.

    CP-8000 Ion Mill Cross Section Polisher

    The CP-8000 Ion Mill Cross Section Polisher gives a perfect finish for SEM sample preparation. Using an argon ion beam, the CP-8000 gently removes material from a sample's surface without deforming or smearing. Easy to use with a touch screen interface.

    Vibration Isolation

    Vibration Isolation Platforms from Daeil Systems offer great performance at an affordable price, and are ideal for isolating COXEM electron microscopes. The active isolation system eliminates vibration in 6 degrees of movement, and is easy to use with auto levelling.

    Evactron E-Series Plasma De-Contaminator

    The Evactron E-Series De-Contaminators are compact, high performance yet simplified plasma cleaners for Electron and Ion Beam Instruments such as SEMs, TEMs, and FIBs. The E-Series delivers cleaning with simplicity for higher resolution and contrast imaging plus improving detector and probe sensitivity that are compromised by contamination.

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