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EM-30 Plus & LE Benchtop Scanning Electron Microscope

Product Features

Key Features

  • Tungsten or CeB6 Filaments
  • High Resolution Imaging
  • SE & BSE Imaging
  • 3 Axis Motorised Stage XYT
  • Intuitive NanoStation Software
The COXEM EM-30 desktop SEM system, with an example SEM image

Ease of Use

Ease of use is guaranteed with the integrated features of the EM-30, and COXEM's simple NanoStation operating software. Ideal for novice SEM users, NanoStation provides a simple and clean graphical interface, with quick access to common imaging settings. Users can click to move around the sample via a mini-map, which provides an overall view of the sample. Users with advanced knowledge of electron microscopy can access the full range of settings and advanced features with NanoStation's Expert mode.

The EM-30 includes a motorised 3-axis XYT sample stage as standard, making it efficient and easy to control the position of the sample while in the chamber. Users can navigate the samples visually with the optional "NavCam", which capture an image of the sample holder when loaded into the chamber.

A screenshot of the COXEM NanoStation SEM operating software

Imaging Capabilities

  • 5 nm resolution
  • 150,000X magnification
  • 1 - 30 kV beam energy
  • Dual SE & BSE detectors
An example SEM image produced with a COXEM SEM of a filter material at 300x magnification

Tungsten and CeB6 Electron Sources

The EM-30 is the only benchtop SEM platform on the market today that can be configured with either a Tungsten (EM-30 Plus) or CeB6 (EM-30 LE) electron source. Because of this, COXEM's benchtop electron microscope systems have unrivalled flexibility.

Tungsten filaments have an operating life time of approximately 100 "beam on" hours, have a very low replacement cost, and are easily exchanged by a user in 10 minutes or less. Using a Tungsten filament electron source can be more cost effective.

A CeB6 (Cerium hexaboride) filament can produce a brighter image, reducing noise and improving high resolution performance. However, while the operating lifetime of a CeB6 filament is higher than Tungsten, the replacement cost is much greater. A CeB6 filament can also require more specialised maintenance to replace. When finding the right SEM, choosing the correct electron beam source can be difficult. To help with this, the team at CN Tech are happy to provide guidance on finding the right SEM for any application.

Backscatter Electron Detector

COXEM's EM30 benchtop SEM features dual secondary electron (SE) and backscatter electron (BSE) detectors. The 4 quadrant BSE detector can be operated in Composition mode for atomic weight contrasted images, or Topo mode for producing topographic images of flat samples.

The BSE detector integrated into the EM-40AX is retractable without disconnection, being able to pivot away to a parking position. This unique feature can only be found in COXEM benchtop SEMs. Retracting the BSE detector allows for a shorter working distance when using the SE detector.

Secondary Electron (SE) image of a grain of rice
Imaging with the Secondary Electron (SE) Detector
Backscatter Electron (BSE) image of a grain of rice
Imaging with the Backscatter Electron (BSE) Detector

3-Axis Sample Positioning Stage

A motorised 3-axis XYT sample position stage ins included as standard with COXEM's EM-30. The a "click to move" interface of the NanoStation operating software, makes navigating around a sample quick and easy. To provide easier examination of a flat sample's topography, the stage can be tilted. Stage tilting is compucentric, adjusting the X axis to ensure the desired region of interest always remains the field of view while tilting.

The chamber door opened on the EM-30 SEM to reveal the 3-axis sample positioning stage and sample holder

Panorama Mode

Combining the NanoStation operating software with a standard 3-axis motorised stage, has allowed COXEM to develop a Panorama mode. Panorama mode provides high resolution image capture for large samples. Hundreds of thousands of images can be collected across a large sample, through automatic control of the motorised stage. These images are then automatically stitched together by NanoStation, creating a single high magnification image of a large sample.

A SEM image of a semiconductor chip layer produced with a COXEM SEM

Technical Specifications

Electron Beam System
Electron Source Tungsten (EM-30 Plus) or CeB6 (EM-30 LE)
Resolution 5nm
Accelerating Voltage 1kV to 30kV
Detector SE Detector, BSE Detector
Imaging Capabilities
Magnification x20 ~ x150,000
Image Sizes RDE: 320x240
TV: 640x480
Slow: 800x600
Photo: 1280x960, 2560x1920, 5120x3840
Frame Rates RDE: Max 30 frames/sec
TV: Max 10 frames/sec
Slow: Max 2 frames/sec
Image Formats BMP, JPEG, PNG, TIFF
Auto Functions Auto Focus
Auto Contrast
Auto Brightness
Auto Filament
Auto Start
Sample Positioning Stage
Stage Type Motorised 3 Axis XYT
X 35mm
Y 35mm
T 0 to 45°
R 360°
Z 5 to 50mm
Maxium Sample Size 60mm in diameter
45mm in height
Main Unit Width 400mm
Main Unit Length 600mm
Main Unit Height 550mm

Options & Accessories

Low Vacuum System

COXEM offer a Low Vacuum System for imaging non-conductive samples without coating during sample preparation. Low vacuum operation can be used to image biological samples or insulating materials in electronics.

Low vacuum operation is used with the BSE detector for imaging, and is effective at low magnifications. The possible vacuum range is 100pa to 1pa.

High Vacuum Mode SEM Image
Imaging in High Vacuum Mode
Low Vacuum Mode SEM Image
Imaging in Low Vacuum Mode

Cool Stage

The COXEM Cool Stage is a temperature-controlled sample stage for COXEM Scanning Electron Microscopes systems. A cool stage is used in electron microscopy to chill biological or other wet specimens, preserving surface features and improving imaging ability. Samples can be cooled to -25°C, and also heated up to 50°C. Temperature is controlled digitally.

COXEM Cool Stage and Cool Stage controller
A SEM image of plant cells, imaged without a Cool Stage and displaying distorted features
Plant cells imaged without Cool Stage
A SEM image of plant cells, imaged with a Cool Stage and showing well preserved surface integrity
Plant cells imaged with Cool Stage

STEM Detector

Both full size and benchtop Scanning Electron Microscope (SEM) systems from COXEM can be expanded to support Scanning Transmission Electron Microscopy (STEM) capabilities with the COXEM STEM Detector. This allows a COXEM SEM to handle multiple imaging applications outside of standard SEM imaging tasks.

COXEM's STEM Detector is mounted inside the SEM chamber, and can be retracted and tilted 90° out of the field of view to allow regular SEM functions. Support for the STEM Detector is fully integrated into the NanoStation operating software for COXEM SEMs, with the same simple and easy operation.

True TEM Detector

Most STEM modules differ from the true TEM principle, and use a platinum mirror and the SEM's SE detector to collect an image. The COXEM STEM Detector uses a true TEM detector beneath the TEM sample.

The STEM Detector supports both Bright Field (BF) and Dark Field (DF) imaging.

TEM Grid Holder

A specially designed TEM grid holder is included with the STEM detector, which mounts onto the SEM stage. Up to 4 standard TEM grids can be accommodated in the holder. The holder has been designed to allow EDS analysis without the need for separate adjustment.

COXEM STEM Detector and TEM sample holder

Product Downloads


COXEM Brochure

COXEM Scanning Electron Microscope range brochure.

Application Notes

COXEM Application Notes 1

A selection of applications documented by COXEM from the life sciences and materials sciences.

COXEM Application Notes 2

A selection of applications documented by COXEM discussing electron microscopy techiques.