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CX-200 Plus Scanning Electron Microscope

Product Features

Key Features

  • High Resolution Imaging
  • SE & BSE Imaging Detectors
  • Chamber View Camera
  • 5 Axis Motorised Stage XYZRT
  • EDS, WDS, EBSD & CL Options
  • Intuitive NanoStation Software
The COXEM CX-200 Plus SEM system, with an example SEM image

Ease of Use

Ease of use is guaranteed with COXEM's NanoStation operating software, and the integrated features of the CX-200 Plus SEM. NanoStation provides a simple and clean graphical interface, with quick access to common imaging settings, which is ideal for novice SEM users. A mini-map provides an overall view of the sample, and users can click to move around the sample. Advanced users can use NanoStation's Expert mode to access more advanced functionality.

The CX-200 Plus includes an integrated chamber camera and a motorised 5-axis sample stage as standard, so it is quick and easy to control and view the position of the sample while in the chamber.

A screenshot of the COXEM NanoStation SEM operating software

Imaging Capabilities

  • 3 nm resolution
  • 300,000X magnification
  • 1 - 30 kV beam energy
  • SE and BSE detectors
An example SEM image produced with a COXEM SEM of a filter material at 300x magnification

5-Axis Sample Positioning Stage

A motorised 5-axis XYZRT sample positioning stage is included as standard with the COXEM CX-200 Plus. With COXEM's NanoStation operating software, users can navigate the sample with an intuitive "click to move" interface. The stage can be tilted, allowing for easier examination of the topography of flat samples. Stage tilting is compucentric, adjusting the X axis to ensure the desired region of interest always remains the field of view while tilting. Large samples up to 160mm are supported, and observable area is 110mm.

Panorama Mode

Combining the advanced features of the CX-200 Plus enables a unique Panorama mode, for acquiring high resolution imaging of large samples. By automatically controlling the CX-200 Plus's motorised stage, hundreds or thousands of high magnification images can be collected across a large sample. The COXEM NanoStation software can then automatically stitch the images together, creating a single high magnification image of a large sample.

A SEM image of a semiconductor chip layer produced with a COXEM SEM

10 Accessory Ports

The CX-200 Plus chamber has 10 Accessory Ports for expanding the electron microscope with upgrades and accessories from COXEM and third parties. Some of the ports are used by default by the SEM's standard components. There are ports specifically designed for EDS and EBSD upgrades, and for the COXEM cooling stage and STEM detector.

Analytical Options

A variety of analytical options are available for the CX-200 Plus. Upgrades for EDS and WDS elemental micro-analysis, EBSD micro-structure crystalline analysis, and CL internal structure analysis.

Examples of the analytical options and upgrades from Oxford Instruments compatible with a COXEM CX-200 Plus SEM, including EDS, EBSD and WDS systems

Technical Specifications

Electron Beam System
Resolution (SE) 3.0nm at 30kV
8.0nm at 3kV
Resolution (BSE) 4.0nm at 30kV
Accelerating Voltage 1-30kV (in 1kV steps)
Apertures Variable - 30 / 50 / 100 / 200 micron
Variable e-Beam Spot Size
Detectors Seconday Electron Detector (SE)
Back-scattered Electron Detector (BSE)
Scanning Transmission Electron Detector (STEM) - Optional
Electron Source Pre-centered Tungsten Filament Cartridge
Supplied with 8 Wehnelt/Filament sets
Imaging Capabilities
Automatic Functions Auto Start
Auto Focus
Auto Contrast & Brightness
Auto Electron Gun Alignment
Magnification 15X - 300,000X
Live Focus Image Sizes RED: 320 x 240 (30 frames/sec)
TV: 640 x 480 (10 frames/sec)
SLOW: 800 x 600 (2 frames/sec)
Image Capture Sizes RED: 320 x 240 (30 frames/sec)
TV: 640 x 480 (10 frames/sec)
SLOW: 800 x 600 (2 frames/sec)
Image Formats BMP
Image Annotation 2-point length
Multi-point length
Angle measurement
Diameter measurement
Area measurements
Arrow & rectangle marking
Text annotations
Sample Positioning Stage
Stage Type Motorised 5-Axis XYZRT
X Axis 0-60mm
Y Axis 0-60mm
Z Axis 5-60mm
R Axis 360°
T Axis -20-90°
Maximum Sample Size 160mm in diameter
55mm in height
Vacuum System
Vacuum Modes High Vacuum (Conducitve)
Low Vacuum (Charge Reduction)
Roughing Vacuum Pump Rotary Vane Pump - Standard
Diaphragm Pump - Optional
High Vacuum Pumps Pfeiffer HiPace Turbo Molecular Pump
Roughing Vacuum Pump Main Unit Width 640mm
Main Unit Depth 680mm
Main Unit Height 1500mm
Main Unit Weight 200kg

Options & Accessories

Low Vacuum System

COXEM offer a Low Vacuum System for imaging non-conductive samples without coating during sample preparation. Low vacuum operation can be used to image biological samples or insulating materials in electronics.

Low vacuum operation is used with the BSE detector for imaging, and is effective at low magnifications. The possible vacuum range is 100pa to 1pa.

High Vacuum Mode SEM Image
Imaging in High Vacuum Mode
Low Vacuum Mode SEM Image
Imaging in Low Vacuum Mode

Cool Stage

The COXEM Cool Stage is a temperature-controlled sample stage for COXEM Scanning Electron Microscopes systems. A cool stage is used in electron microscopy to chill biological or other wet specimens, preserving surface features and improving imaging ability. Samples can be cooled to -25°C, and also heated up to 50°C. Temperature is controlled digitally.

COXEM Cool Stage and Cool Stage controller
A SEM image of plant cells, imaged without a Cool Stage and displaying distorted features
Plant cells imaged without Cool Stage
A SEM image of plant cells, imaged with a Cool Stage and showing well preserved surface integrity
Plant cells imaged with Cool Stage

STEM Detector

Both full size and benchtop Scanning Electron Microscope (SEM) systems from COXEM can be expanded to support Scanning Transmission Electron Microscopy (STEM) capabilities with the COXEM STEM Detector. This allows a COXEM SEM to handle multiple imaging applications outside of standard SEM imaging tasks.

COXEM's STEM Detector is mounted inside the SEM chamber, and can be retracted and tilted 90° out of the field of view to allow regular SEM functions. Support for the STEM Detector is fully integrated into the NanoStation operating software for COXEM SEMs, with the same simple and easy operation.

True TEM Detector

Most STEM modules differ from the true TEM principle, and use a platinum mirror and the SEM's SE detector to collect an image. The COXEM STEM Detector uses a true TEM detector beneath the TEM sample.

The STEM Detector supports both Bright Field (BF) and Dark Field (DF) imaging.

TEM Grid Holder

A specially designed TEM grid holder is included with the STEM detector, which mounts onto the SEM stage. Up to 4 standard TEM grids can be accommodated in the holder. The holder has been designed to allow EDS analysis without the need for separate adjustment.

COXEM STEM Detector and TEM sample holder

Product Downloads


Product Brochure

COXEM CX-200 Plus Scanning Electron Microscope Brochure.

COXEM Brochure

COXEM Scanning Electron Microscope range brochure.

Application Notes

COXEM Application Notes 1

A selection of applications documented by COXEM from the life sciences and materials sciences.

COXEM Application Notes 2

A selection of applications documented by COXEM discussing electron microscopy techiques.