COXEM's CX-200 Plus full-size Scanning Electron Microscope provides high performance in a compact size, and at an attractive price. This floor model SEM features high resolution imaging, with integrated SE and BSE detectors. With a 5-axis motorised stage and chamber view camera as standard, and the simple NanoStation operating software, the CX-200 Plus is easy to use. A range of analytical options are available, including EDS and WDS, EBSD and CL detectors. The CX-200 Plus is an ideal solution for electron microscopy and advanced materials characterisation applications.
- High Resolution Imaging
- SE & BSE Imaging Detectors
- Chamber View Camera
- 5 Axis Motorised Stage XYZRT
- EDS, WDS, EBSD & CL Options
- Intuitive NanoStation software
Ease of Use
Ease of use is guaranteed with COXEM's NanoStation operating software, and the integrated features of the CX-200 Plus SEM. NanoStation provides a simple and clean graphical interface, with quick access to common imaging settings, which is ideal for novice SEM users. A mini-map provides an overall view of the sample, and users can click to move around the sample. Advanced users can use NanoStation's Expert mode to access more advanced functionality.
The CX-200 Plus includes an integrated chamber camera and a motorised 5-axis sample stage as standard, so it is quick and easy to control and view the position of the sample while in the chamber.
- 3 nm resolution
- 300,000X magnification
- 1 - 30 kV beam energy
- SE and BSE detectors
5-Axis Sample Positioning Stage
A motorised 5-axis XYZRT sample positioning stage is included as standard with the COXEM CX-200 Plus. With COXEM's NanoStation operating software, users can navigate the sample with an intuitive "click to move" interface. The stage can be tilted, allowing for easier examination of the topography of flat samples. Stage tilting is compucentric, adjusting the X axis to ensure the desired region of interest always remains the field of view while tilting. Large samples up to 160mm are supported, and observable area is 110mm.
Combining the advanced features of the CX-200 Plus enables a unique Panorama mode, for acquiring high resolution imaging of large samples. By automatically controlling the CX-200 Plus's motorised stage, hundreds or thousands of high magnification images can be collected across a large sample. The COXEM NanoStation software can then automatically stitch the images together, creating a single high magnification image of a large sample.
10 Accessory Ports
The CX-200 Plus chamber has 10 Accessory Ports for expanding the electron microscope with upgrades and accessories from COXEM and third parties. Some of the ports are used by default by the SEM's standard components. There are ports specifically designed for EDS and EBSD upgrades, and for the COXEM cooling stage and STEM detector.
A variety of analytical options are available for the CX-200 Plus. Upgrades for EDS and WDS elemental micro-analysis, EBSD micro-structure crystalline analysis, and CL internal structure analysis.
Electron Beam System Resolution (SE) 3.0nm at 30kV 8.0nm at 3kV Resolution (BSE) 4.0nm at 30kV Accelerating Voltage 1-30kV (in 1kV steps) Apertures Variable - 30 / 50 / 100 / 200 micron Variable e-Beam Spot Size Detectors Seconday Electron Detector (SE) Back-scattered Electron Detector (BSE) Scanning Transmission Electron Detector (STEM) - Optional Electron Source Pre-centered Tungsten Filament Cartridge Supplied with 8 Wehnelt/Filament sets Imaging Capabilities Automatic Functions Auto Start Auto Focus Auto Contrast & Brightness Auto Electron Gun Alignment Magnification 15X - 300,000X Live Focus Image Sizes RED: 320 x 240 (30 frames/sec) TV: 640 x 480 (10 frames/sec) SLOW: 800 x 600 (2 frames/sec) Image Capture Sizes RED: 320 x 240 (30 frames/sec) TV: 640 x 480 (10 frames/sec) SLOW: 800 x 600 (2 frames/sec) Image Formats BMP JEPG PNG TIFF Image Annotation 2-point length Multi-point length Angle measurement Diameter measurement Area measurements Arrow & rectangle marking Text annotations Sample Positioning Stage Stage Type Motorised 5-Axis XYZRT X Axis 0-60mm Y Axis 0-60mm Z Axis 5-60mm R Axis 360° T Axis -20-90° Maximum Sample Size 160mm in diameter 55mm in height Vacuum System Vacuum Modes High Vacuum (Conducitve) Low Vacuum (Charge Reduction) Roughing Vacuum Pump Rotary Vane Pump - Standard Diaphragm Pump - Optional High Vacuum Pumps Pfeiffer HiPace Turbo Molecular Pump Dimensions Roughing Vacuum Pump Main Unit Width 640mm Main Unit Depth 680mm Main Unit Height 1500mm Main Unit Weight 200kg