CX-200 Plus Scanning Electron Microscope

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Short Description
  • The COXEM CX-200 Plus Scanning Electron Microscope provides high performance in a compact size, at an attractive price. This full size SEM features high resolution imaging, and SE and BSE detectors. With a 5-axis motorised stage and chamber view camera as standard, the CX-200 Plus is easy to use. Analytical options include EDS, EBSD and CL detectors.

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Product Overview
  • COXEM's CX-200 Plus full-size Scanning Electron Microscope provides high performance in a compact size, and at an attractive price. This floor model SEM features high resolution imaging, with integrated SE and BSE detectors. With a 5-axis motorised stage and chamber view camera as standard, and the simple NanoStation operating software, the CX-200 Plus is easy to use. A range of analytical options are available, including EDS and WDS, EBSD and CL detectors. The CX-200 Plus is an ideal solution for electron microscopy and advanced materials characterisation applications.

    Key Features

    • High Resolution Imaging
    • SE & BSE Imaging Detectors
    • Chamber View Camera
    • 5 Axis Motorised Stage XYZRT
    • EDS, WDS, EBSD & CL Options
    • Intuitive NanoStation software

    Ease of Use

    Ease of use is guaranteed with COXEM's NanoStation operating software, and the integrated features of the CX-200 Plus SEM. NanoStation provides a simple and clean graphical interface, with quick access to common imaging settings, which is ideal for novice SEM users. A mini-map provides an overall view of the sample, and users can click to move around the sample. Advanced users can use NanoStation's Expert mode to access more advanced functionality.

    The CX-200 Plus includes an integrated chamber camera and a motorised 5-axis sample stage as standard, so it is quick and easy to control and view the position of the sample while in the chamber.

    Imaging Capabilities

    • 3 nm resolution
    • 300,000X magnification
    • 1 - 30 kV beam energy
    • SE and BSE detectors

    5-Axis Sample Positioning Stage

    A motorised 5-axis XYZRT sample positioning stage is included as standard with the COXEM CX-200 Plus. With COXEM's NanoStation operating software, users can navigate the sample with an intuitive "click to move" interface. The stage can be tilted, allowing for easier examination of the topography of flat samples. Stage tilting is compucentric, adjusting the X axis to ensure the desired region of interest always remains the field of view while tilting. Large samples up to 160mm are supported, and observable area is 110mm.

    Panorama Mode

    Combining the advanced features of the CX-200 Plus enables a unique Panorama mode, for acquiring high resolution imaging of large samples. By automatically controlling the CX-200 Plus's motorised stage, hundreds or thousands of high magnification images can be collected across a large sample. The COXEM NanoStation software can then automatically stitch the images together, creating a single high magnification image of a large sample.

    10 Accessory Ports

    The CX-200 Plus chamber has 10 Accessory Ports for expanding the electron microscope with upgrades and accessories from COXEM and third parties. Some of the ports are used by default by the SEM's standard components. There are ports specifically designed for EDS and EBSD upgrades, and for the COXEM cooling stage and STEM detector.

    Analytical Options

    A variety of analytical options are available for the CX-200 Plus. Upgrades for EDS and WDS elemental micro-analysis, EBSD micro-structure crystalline analysis, and CL internal structure analysis.

  • Electron Beam System
    Resolution (SE) 3.0nm at 30kV
    8.0nm at 3kV
    Resolution (BSE) 4.0nm at 30kV
    Accelerating Voltage 1-30kV (in 1kV steps)
    Apertures Variable - 30 / 50 / 100 / 200 micron
    Variable e-Beam Spot Size
    Detectors Seconday Electron Detector (SE)
    Back-scattered Electron Detector (BSE)
    Scanning Transmission Electron Detector (STEM) - Optional
    Electron Source Pre-centered Tungsten Filament Cartridge
    Supplied with 8 Wehnelt/Filament sets
    Imaging Capabilities
    Automatic Functions Auto Start
    Auto Focus
    Auto Contrast & Brightness
    Auto Electron Gun Alignment
    Magnification 15X - 300,000X
    Live Focus Image Sizes RED: 320 x 240 (30 frames/sec)
    TV: 640 x 480 (10 frames/sec)
    SLOW: 800 x 600 (2 frames/sec)
    Image Capture Sizes RED: 320 x 240 (30 frames/sec)
    TV: 640 x 480 (10 frames/sec)
    SLOW: 800 x 600 (2 frames/sec)
    Image Formats BMP
    Image Annotation 2-point length
    Multi-point length
    Angle measurement
    Diameter measurement
    Area measurements
    Arrow & rectangle marking
    Text annotations
    Sample Positioning Stage
    Stage Type Motorised 5-Axis XYZRT
    X Axis 0-60mm
    Y Axis 0-60mm
    Z Axis 5-60mm
    R Axis 360°
    T Axis -20-90°
    Maximum Sample Size 160mm in diameter
    55mm in height
    Vacuum System
    Vacuum Modes High Vacuum (Conducitve)
    Low Vacuum (Charge Reduction)
    Roughing Vacuum Pump Rotary Vane Pump - Standard
    Diaphragm Pump - Optional
    High Vacuum Pumps Pfeiffer HiPace Turbo Molecular Pump
    Roughing Vacuum Pump Main Unit Width 640mm
    Main Unit Depth 680mm
    Main Unit Height 1500mm
    Main Unit Weight 200kg
Product Options
  • AZtecOne & x-act EDS System

    AZtecOne is an easy to use but powerful solution for Energy Dispersive Spectroscopy (EDS) in SEMs. An accurate and featureful, yet simple materials characterisation system, AZtecOne is elemental microanalysis solution with proven reliability.

    AZtecLive & ULTIM Max EDS System

    AZtecLive is a revolutionary new way to perform EDS analysis. Live chemical X-ray imaging provides a real time view of a sample's chemistry, making EDS analysis faster and easier than ever. Powerful SDD sensors offer unparalleled speed and sensitivity.

    AZtecLive & ULTIM Extreme EDS System

    ULTIM Extreme provides the ultimate spatial resolution and low energy performance for in-situ EDS. Optimised for imaging and EDS in ultra-high resolution FEG-SEMs, ULTIM Extreme provides high resolution and low energy materials characterisation.

    AZtecHKL and Symmetry EBSD System

    Symmetry is a revolutionary EBSD detector based on a custom CMOS sensor, with exceptional performance. Providing high speed and high sensitivity, Symmetry suits all EBSD applications without compromise. AZtecHKL EBSD software provides real-time data acquisition and analysis.

    INCA WAVE & INCAEnergy+ WDS System

    The only WDS spectrometer with the same fully focusing geometry used in EPMA, INCA WAVE 2x greater resolution and produces stable, reproducible results. Excellent performance, with effective peak separation and trace element detection.

    Low Vacuum System

    Optional Low vacuum SEM imaging can be used with COXEM SEMs to image no-conductive samples without coating. Low vacuum operation is used with the BSE detector for imaging.

    Cool Stage

    The Cool Stage is a temperature-controlled sample stage for COXEM electron microscopes. A cool stage can be used to maintain surface features of biological or other wet specimens. Samples can be chilled to -25°C, and also heated up to 50°C.

    STEM Detector

    Full Size and Tabletop SEMs from COXEM can be expanded with Scanning Transmission Electron Microscopy (STEM) capabilities with COXEM's STEM Detector. The STEM Detector is retractable to allow standard SEM functions, and features a true TEM detector positioned beneath the TEM sample. Supports BF and DF imaging, and with a holder for 4 TEM grids.

    SPT-20 Ion Sputter Coater

    The SPT-20 Ion Sputter Coater is a simple to use, compact and cost-effective solution for sputter coating non-conductive specimens in SEM sample preparation. Features a user friendly touch screen interface, and supports multiple metal types.

    CP-8000 Ion Mill Cross Section Polisher

    The CP-8000 Ion Mill Cross Section Polisher gives a perfect finish for SEM sample preparation. Using an argon ion beam, the CP-8000 gently removes material from a sample's surface without deforming or smearing. Easy to use with a touch screen interface.

    Evactron E50 Plasma De-Contaminator

    The Evactron E50 De-Contaminators are compact, high performance yet simplified plasma cleaners for Electron and Ion Beam Instruments such as SEMs, TEMs, and FIBs. The E50 delivers high power cleaning for superior resolution and imaging plus improved detector and probe sensitivity that are compromised by contamination.

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