KLA

The KLA P-7 Stylus Profiler offers industry leading measurement readability for reliable measurement performance. With a 150 mm scan stage as standard, the P-7 is the only stylus profiler on the market offering long scan capability without stitching. A 2 µm radius stylus is standard, with options for sub-micron to 25 µm radii available.

The KLA P-17 Stylus Profiler offers industry leading measurement readability for reliable measurement performance. With a 200 mm scan stage as standard, the P-17 is the only stylus profiler on the market offering long scan capability without stitching. The UltraLite® sensor provides the highest vertical resolution.