- SMART and ZSI acquire algorithms to simplify measurement setup
- Easy and flexible script setup with drag and drop of functions
- Fast 3D step height, roughness, and defect characterization
The MicroXAM-800 is an optical surface profiler from KLA's surface metrology product line. This non-contact, white light interferometry system differentiates itself with an innovative yet simple user interface. It features a powerful suite of functions to support the broadest range of applications.
The MicroXAM-800 is a flexible platform for both acquiring and analyzing data. The system includes the hardware and software features necessary to meet stringent R&D and production environment requirements. Features include programmable stages, simple recipe set-up, scripting, and an expandable library of analysis tools. A variety of objectives, sample stages, and options are available to meet the needs of any application.
The 1.4 megapixel camera provides high resolution imaging at 1360 by 1040 pixel resolution. By switching the camera to 'binning mode' adjacent pixels are combined, doubling the imaging speed at 680 x 520 pixel resolution.
A 250 µm piezo actuator is included for high resolution scanning over a large Z range.
The five position turret holds objectives with magnifications ranging from 5x to 100x to support both micro- and macro-topography applications. The turret can be quickly removed to directly mount either a 2.5x or 5x objective. Calibrations keep your feature centered and focused when switching between objectives.
A solid state light source with green and white LEDs support SMART, PSI, VSI, and ZSI acquisition modes. LEDs provide a stable, long-life source of light, reducing the cost of ownership.
Motorized stages for the X-Y and Z-axis are standard on the MicroXAM-800. The X-Y stage has a range of 152 mm by 152 mm. The Z stage has a range of 125 mm, and supports an optional 76 mm offset block for taller samples. An optional theta stage has a range of 360°. The travel along all axis of motion is programmable with scripting.
Several sample holders are available to support a variety of sample types. Options include a simple flat surface, an optical bench layout, precision universal chucks (150 mm or 200 mm), and the solar chuck (156 mm x 156 mm). The chucks include locator pins for various sample configurations and a manual vacuum switch.
A Windows 7, 64-bit computer with a 23-inch widescreen monitor is standard. MS Office is included, enabling direct copy-and-paste transfer of data from the MicroXAM-800 software to PowerPoint, Word, and Excel.