The InSEM is a tool for characterizing the mechanical properties of surfaces or structures, which is designed to function with sub-nanometer resolution in an in-situ vaccum environment such as an SEM or FIB.
The InSEM is designed to be modular and flexible, to enable a wide range of application. Port availability on SEM/FIB chambers is often an issue. We've designed the InSEM to mount to a variety of ports, or to be mounted directly on the SEM stage. As different applications call for different system configurations, the InSEM can easily be moced from one port to another or assembled into the on-stage configuration.
The InSEM is designed to be modular and flexible, to enable a wide range of applications. Port availability on SEM/FIB chambers is often an issue. We've designed the InSEM to mount to a variety of ports, or to be mounted directly on the SEM stage. As different applications call for different system configurations, the InSEM can easily be moved from one port to another or assembled into the on-stage configuration.
KLA provides a variety of tools for use in mechanical properties testing for the SEM/FIB or vacuum environment. All of our devices and software are designed to be modular, easy-to-use and high-performance. Many of the testing and characterization techniques are based on the highly cited paper, W.C. Oliver and G.M. Pharm's ""An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments,"" J. Mater Res., Vol. 7, No. 6, pp. 15-64-1583 (June 1992), which forms the basis for nanoindentation measurements of hardness and modulus. However, the InSEM has great capabilities and is being used for compression and tensile testing more common to traditional tensile testers and DMA testers. All testing techniques offer the ability to watch the deformation as it happens.
The InSEM utilizes the InForce 50, InQuest Controller and InView Software in a tool for in-situ SEM, FIB or vacuum characterization of the mechanical properties of surfaces or structures. The InSEM I and InSEM II mount to your SEM/FIB chamber wall to minimize the footprint within the chamber, and to make it easy to retract the system out of the way while other SEM/FIB testing modes are underway.
The InSEM III utilizes a stage-mounted cradle and micropositioners to position a sample relative to the InForce actuator. Designed to maximize frame stiffness while optimizing positioning resolution, the InSEM III provides versatile on-stage testing capabilities for applications in which the on-chamber configuration is limiting.
The KLA InSEM HT provides 800°C isothermal heating of the InForce tip and sample for the InSEM in-situ mechanical properties microprobe. Independent control of the tip and sample temperatures is integrated with multi-location thermocouple feedback, active cooling, and of course the precision and dynamic range of the mechanical test system itself.