Low Vacuum System

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Short Description
  • Optional Low vacuum SEM imaging can be used with COXEM SEMs to image no-conductive samples without coating. Low vacuum operation is used with the BSE detector for imaging.

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Product Overview
  • COXEM offer a Low Vacuum System for imaging non-conductive samples without coating during sample preparation. Low vacuum operation can be used to image biological samples or insulating materials in electronics.

    High Vacuum Mode SEM Image
    Imaging in High Vacuum Mode
    Low Vacuum Mode SEM Image
    Imaging in Low Vacuum Mode

    Low vacuum operation is used with the BSE detector for imaging, and is effective at low magnifications. The possible vacuum range is 100pa to 1pa.

    All of the COXEM scanning electron microscopes, including the EM-30 Plus & LE Desktop SEM, the EM-30AX Plus & LE Desktop SEM with EDS, and CX-200 Plus SEM can be configured to support low-vacuum operation.

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