The EM-30 is one of the most advanced tabletop SEM systems on the market today, offering high-end capabilities in a compact form factor. COXEM have developed the only benchtop SEM configurable with either a Tungsten (EM-30 Plus) or CeB6 (EM-30 LE) electron source. The EM-30 has powerful high resolution imaging capabilities, and features integrated dual SE and BSE detectors. A 3-axis motorised stage as standard and the simple NanoStation operating software assures ease of use.
Ease of Use
Ease of use guaranteed with the integrated features of the EM-30, and COXEM's simple NanoStation operating software. Ideal for novice SEM users, NanoStation provides a simple and clean graphical interface, with quick access to common imaging settings. Users can click to move around the sample via a mini-map, which provides an overall view of the sample. Advanced users can access the full range of settings and advanced features with NanoStation's Expert mode.
The EM30 includes a motorised 3-axis XYT sample stage as standard, making it efficient and easy to control the position of the sample while in the chamber. Users can navigate the samples visually with the optional "NavCam", which capture an image of the sample holder when loaded into the chamber.
- 5 nm resolution
- 150,000X magnification
- 1 - 30 kV beam energy
- Dual SE & BSE detectors
Backscatter Electron Detector
COXEM's EM30 benchtop SEM features dual secondary electron (SE) and backscatter electron (BSE) detectors. The 4 quadrant BSE detector can be operated in Composition mode for atomic weight contrasted images, or Topo mode for producing topographic images of flat samples.
The BSE detector integrated into the EM-40AX is retractable without disconnection, being able to pivot away to a parking position. This unique feature can only be found in COXEM benchtop SEMs. Retracting the BSE detector allows for a shorter working distance when using the SE detector.
3-Axis Sample Positioning Stage
A motorised 3-axis XYT sample position stage ins included as standard with COXEM's EM-30. The a "click to move" interface of the NanoStation operating software, makes navigating around a sample quick and easy. To provide easier examination of a flat sample's topography, the stage can be tilted. Stage tilting is compucentric, adjusting the X axis to ensure the desired region of interest always remains the field of view while tilting.
Combining the NanoStation operating software with a standard 3-axis motorised stage, has allowed COXEM to develop a Panorama mode. Panorama mode provides high resolution image capture for large samples. Hundreds of thousands of images can be collected across a large sample, through automatic control of the motorised stage. These images are then automatically stitched together by NanoStation, creating a single high magnification image of a large sample.
Electron Beam System Electron Source Tungsten (EM-30 Plus) or CeB6 (EM-30 LE) Resolution 5nm Accelerating Voltage 1kV to 30kV Detector SE Detector, BSE Detector Imaging Capabilities Magnification x20 ~ x150,000 Image Sizes RDE: 320x240 TV: 640x480 Slow: 800x600 Photo: 1280x960, 2560x1920, 5120x3840 Frame Rates RDE: Max 30 frames/sec TV: Max 10 frames/sec Slow: Max 2 frames/sec Image Formats BMP, JPEG, PNG, TIFF Auto Functions Auto Focus Auto Contrast Auto Brightness Auto Filament Auto Start Sample Positioning Stage Stage Type Motorised 3 Axis XYT X 35mm Y 35mm T 0 to 45° R 360° Z 5 to 50mm Maxium Sample Size 60mm in diameter 45mm in height Dimensions Main Unit Width 400mm Main Unit Length 600mm Main Unit Height 550mm